On chip MnO2-based 3D micro-supercapacitors with ultra-high areal energy density

In the near future, Internet of Things will be widely deployed all over connected world. Powering crucial for miniaturized electronic devices requiring fast charging, high energy density and long term-durability. 3D micro-supercapacitors are an attractive storage solution at millimeter scale to power IoT exhibiting small form factor packaging issues. However, there nowadays not any microdevices on shelves that could fulfill both mass production requirements. Here, we demonstrate collective fabrication (MSCs) integrated silicon wafer using MnO2 as active electrode material 5 M aqueous LiNO3 electrolyte. 0.05 – 0.1 mWh cm?2 densities reached by fabricated MSCs remarkable, exceeding those state-of-the-art micro-supercapacitors, competing hybrid approaching performance lithium micro-batteries. Without sacrificing (> 1 mW cm?2), a very good cycling behavior 10 000 cycles (~ 15% loss).